XY Open-frame gantry (1900 x 600 mm)

Flatness ± 50um, yaw ± 3 arc sec

Accuracy ± 30um, repeatability ± 6um

Vacuum - 10-3 Torr

3 U amplifier box, and PCI motion controller

Modified Ultra 400 x 300 mm

± 0.5um repeatability ± 3um accuracy

± 2um flatness / straightness

± 5 arc sec pitch ± 2 arc sec yaw

Vacuum 10-7 Torr, 100mGauss, 90 Kg moving weight

3 U amplifier box, and PCI motion controller

XY Luge LM with special Z wedge with integrated theta

Repeatability ± 1um full-stroke at wafer surface

Accuracy ± 5um after mapping

Integrated to customer electronics

XYZ composite-base gantry

Straightness ± 5um per 400mm

Flatness 1.27um per 25mm

Constant velocity ± 0.5% per 25um interval

Digital current loop integrated motion controller

Linear motor driven XY stages

Travel 1.5m x 1m

Accuracy ± 12um (full travel)

Bi-directional repeatability ± 3um

Straightness ± 10um

Flatness ± 5um

Luge LM XYZ travel 1,200 x 600 x 90mm

500 mm/ sec velocity 0.6 g acceleration

± 25um accuracy ± 5um repeatability

3 U amplifier and PCI motion controller