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Electromechanical Automation (Motion Control Systems), North America:  



Flat Panel Gen 5 Metrology
  • XY Open-frame gantry (1900 x 600 mm)

  • Flatness ± 50um, yaw ± 3 arc sec

  • Accuracy ± 30um, repeatability ± 6um

  • Vacuum - 10-3 Torr

  • 3 U amplifier box, and PCI motion controller



  • Semiconductor E-Beam Inspection
  • Modified Ultra 400 x 300 mm

  • ± 0.5um repeatability ± 3um accuracy

  • ± 2um flatness / straightness

  • ± 5 arc sec pitch ± 2 arc sec yaw

  • Vacuum 10-7 Torr, 100mGauss, 90 Kg moving weight

  • 3 U amplifier box, and PCI motion controller



  • Semiconductor Thin Film Wafer Metrology
  • XY Luge LM with special Z wedge with integrated theta

  • Repeatability ± 1um full-stroke at wafer surface

  • Accuracy ± 5um after mapping

  • Integrated to customer electronics



  • Semiconductor Vision-Based IC Lead Verification
  • XYZ composite-base gantry

  • Straightness ± 5um per 400mm

  • Flatness 1.27um per 25mm

  • Constant velocity ± 0.5% per 25um interval

  • Digital current loop integrated motion controller



  • Solar - Panel Scribing
  • Linear motor driven XY stages

  • Travel 1.5m x 1m

  • Accuracy ± 12um (full travel)

  • Bi-directional repeatability ± 3um

  • Straightness ± 10um

  • Flatness ± 5um



  • Genomics, High-Throughput Screening
  • Luge LM XYZ travel 1,200 x 600 x 90mm

  • 500 mm/ sec velocity 0.6 g acceleration

  • ± 25um accuracy ± 5um repeatability

  • 3 U amplifier and PCI motion controller



  • Aerospace Non-Contact Blade Inspection

    Parker Hannifin Corporation, Electromechanical Automation, 5500 Business Park Drive, Rohnert Park, CA 94928
    707-584-7558 or 800-358-9068
    Email: Technical Support
     
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