| A Stage Series |
 |
F
Limits |
|
U
|
Ultra
Series |
1
|
None |
|
2
|
End of Travel |
| B Metric Width of Stage |
3
|
End of Travel and
Home |
|
200
|
200
mm |
|
|
300
|
300 mm |
G Linear Encoder |
|
400
|
400 mm
|
1
|
None |
|
600
|
600 mm |
2
|
0.1 µm |
|
3
|
0.5
µm |
| C Frame |
U200
|
U300
|
U400
|
U600
|
4
|
1.0 µm |
|
X
|
Closed
|
Closed
|
Closed
|
Closed
|
5
|
5.0
µm |
|
H
|
—
|
Open
|
Open
|
Open
|
|
|
H Motor Mounting |
| D Travel |
U200
|
U300
|
U400
|
U600
|
1
|
None |
|
1
|
100 mm
|
—
|
—
|
—
|
2
|
NEMA
23 |
|
2
|
200 mm
|
200 mm
|
—
|
—
|
3
|
BM60 |
|
3
|
300 mm
|
300 mm
|
300 mm
|
—
|
|
|
4
|
400 mm
|
400 mm
|
400 mm
|
—
|
I PACT / Environment |
|
5
|
—
|
500 mm
|
500 mm
|
500 mm
|
1
|
None
(Standard) |
|
2
|
PACT |
| E Drive Type |
3
|
Hollow
Roller |
| Lead
Screw Options (Lead) |
4
|
Hollow Rollers
with PACT |
|
1
|
0.1 in |
5
|
Clean Room (Class
10,000) |
|
2
|
0.2
in |
6
|
Clean Room (Class 10,000) with
PACT |
|
3
|
1 mm |
7
|
Clean Room (Class
10,000) Hollow Roller |
| Ball
Screw Options (Lead) |
8
|
Clean Room (Class 10,000) Hollow
Roller with PACT |
|
4
|
3 mm |
9
|
Vacuum (No
Finish) |
|
5
|
5
mm |
A
|
Vacuum (No Finish) Hollow
Roller |
|
6
|
10 mm |
B
|
Radiation (Nickel
Plating) Hollow Roller |
| Linear
Motor |
|
|
7
|
Linear Motor
Drive |
|